The DDS600 runs on a linear motor that eliminates the need for mechanical couplings, allowing for a backlash-free operation that enables highly repetitive operations. A compact encoder redhead was also specified to allow integration with low profile motion stages while keeping stage rigidity.

The MLS 203 is equipped with the same linear motor, and utilises Renishaw’s Tonic encoder system to achieve minimum 100nm step-size, ±0.25 μm bi-directional repeatability, ±0.25 μm homing accuracy and a maximum speed of 0.25 m/s.